Underwater Imaging Using a 1 × 16 CMUT Linear Array

oleh: Rui Zhang, Wendong Zhang, Changde He, Yongmei Zhang, Jinlong Song, Chenyang Xue

Format: Article
Diterbitkan: MDPI AG 2016-03-01

Deskripsi

A 1 × 16 capacitive micro-machined ultrasonic transducer linear array was designed, fabricated, and tested for underwater imaging in the low frequency range. The linear array was fabricated using Si-SOI bonding techniques. Underwater transmission performance was tested in a water tank, and the array has a resonant frequency of 700 kHz, with pressure amplitude 182 dB (μPa·m/V) at 1 m. The −3 dB main beam width of the designed dense linear array is approximately 5 degrees. Synthetic aperture focusing technique was applied to improve the resolution of reconstructed images, with promising results. Thus, the proposed array was shown to be suitable for underwater imaging applications.