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The environmental and economic pressures caused by energy consumption have led to an increased consciousness of energy-saving in the manufacturing industry. To this end, this paper focuses on an unrelated parallel machine problem with multiple auxiliary resources, which is a typical configuration in the lithography process of wafer fabrication. By comprehensively considering the jobs with different processing demands, setup times, ready times, resource constraints and energy consumptions, a scheduling model with the objective functions of minimizing the total energy consumption of the system and the total weighted completion time is developed. Based on the mathematical model, a novel modified multi-objective artificial immune algorithm integrated with the non-domination sorting strategy is proposed to solve the problem. Furthermore, to improve the performance of the proposed algorithm, clone operators, neighborhood search operators, and elite preservation operators are applied to the algorithm. The experimental results and analysis validate that the presented algorithm is efficient and effective.