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To obtain high precision and quality of laser ceramic scribing , people should consider the laser scribing parameters and the geometries of specimen size. In this paper, the effect of specimen size on laser scribing width and depth of Al2O3 ceramics was simulated and verified by using ANSYS software and Diode Pumped Solid State (DPSS) laser scribing, respectively. The calculated results and the experimental results all proved that the specimen size had important effect on laser scribing width and depth due to the heat accumulation effect during laser scribing.