Wafer-scale functional circuits based on two dimensional semiconductors with fabrication optimized by machine learning
oleh: Xinyu Chen, Yufeng Xie, Yaochen Sheng, Hongwei Tang, Zeming Wang, Yu Wang, Yin Wang, Fuyou Liao, Jingyi Ma, Xiaojiao Guo, Ling Tong, Hanqi Liu, Hao Liu, Tianxiang Wu, Jiaxin Cao, Sitong Bu, Hui Shen, Fuyu Bai, Daming Huang, Jianan Deng, Antoine Riaud, Zihan Xu, Chenjian Wu, Shiwei Xing, Ye Lu, Shunli Ma, Zhengzong Sun, Zhongyin Xue, Zengfeng Di, Xiao Gong, David Wei Zhang, Peng Zhou, Jing Wan, Wenzhong Bao
| Format: | Article |
|---|---|
| Diterbitkan: | Nature Portfolio 2021-10-01 |
Deskripsi
Here, the authors demonstrate the application of machine learning to optimize the device fabrication process for wafer-scale 2D semiconductors, and eventually fabricate digital, analog, and optoelectrical circuits.