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Evaluation of a 100-nm Gate Length E-Mode InAs High Electron Mobility Transistor With Ti/Pt/Au Ohmic Contacts and Mesa Sidewall Channel Etch for High-Speed and Low-Power Logic Applications
oleh: Jing-Neng Yao, Yueh-Chin Lin, Heng-Tung Hsu, Kai-Chun Yang, Hisang-Hua Hsu, Simon M. Sze, Edward Yi Chang
Format: | Article |
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Diterbitkan: | IEEE 2018-01-01 |
Deskripsi
In this paper, a 100-nm gate length InAs high electron mobility transistor (HEMT) with non-alloyed Ti/Pt/Au ohmic contacts and mesa sidewall channel etch was investigated for high-speed and low-power logic applications. The device exhibited a low subthreshold swing (SS) of 63.3 mV/decade, a drain induced barrier lowering value of 23.3 mV/V, an I<sub>ON</sub>/I<sub>OFF</sub> ratio of 1.34 × 10<sup>4</sup>, a G<sub>m,max</sub>/SS ratio of 27.6, a current gain cut-off frequency of 439 GHz with a gate delay time of 0.36 ps, and an off-state gate leakage current of less than 1.6 × 10<sup>-5</sup> A/mm at V<sub>DS</sub> = 0.5 V. These results demonstrated that the presence of non-annealed ohmic contacts with mesa sidewall etch process allowed the fabrication of InAs HEMTs with excellent electrical characteristics for high-speed and low-power logic applications.