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Conical Nanotubes Synthesized by Atomic Layer Deposition of Al<sub>2</sub>O<sub>3</sub>, TiO<sub>2</sub>, and SiO<sub>2</sub> in Etched Ion-Track Nanochannels
oleh: Nils Ulrich, Anne Spende, Loïc Burr, Nicolas Sobel, Ina Schubert, Christian Hess, Christina Trautmann, Maria Eugenia Toimil-Molares
Format: | Article |
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Diterbitkan: | MDPI AG 2021-07-01 |
Deskripsi
Etched ion-track polycarbonate membranes with conical nanochannels of aspect ratios of ~3000 are coated with Al<sub>2</sub>O<sub>3</sub>, TiO<sub>2</sub>, and SiO<sub>2</sub> thin films of thicknesses between 10 and 20 nm by atomic layer deposition (ALD). By combining ion-track technology and ALD, the fabrication of two kinds of functional structures with customized surfaces is presented: (i) arrays of free-standing conical nanotubes with controlled geometry and wall thickness, interesting for, e.g., drug delivery and surface wettability regulation, and (ii) single nanochannel membranes with inorganic surfaces and adjustable isoelectric points for nanofluidic applications.