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Abstract Chemical vapor deposition (CVD) polymerization is a prevalent technique for fabricating conformal, defect-free, and systematically adjustable organic thin films. CVD is particularly beneficial for barrier coatings due to its ability to eliminate solvent-related environmental, health, and safety risk factors and provide a wide spectrum of post-polymerization modification strategies. This review discusses poly-p-xylylene and its functional derivatives. CVD polymerization of [2.2]paracyclophane precursors has undergone a recent renaissance due to advancements in chemical and morphological surface manipulation. This review summarizes emerging trends based on the following outline: Table of content: 1 Introduction 2 CVD Polymerization as a Sustainable Coating Technology 3 CVD Instrumentation 4 Poly-p-xylylene Coatings: Background of Polymerization Process and Functionalized Films 5 Main Applications of Poly-p-xylylenes 6 Area-Selective CVD Polymerization 7 Fabrication and Applications of Topological Structures 8 Conclusions and Outlook