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Optical meta-surface element is a kind of two-dimensional ultra-thin device based on the regular arrangement of single-layer or multi-layer sub-wavelength nanostructure array. It can realize the sudden operation of optical amplitude, phase, polarization, the wavelength in a subwavelength scale. In this paper, we design a Huygens meta-surface based on low loss all-dielectric, which can approach the phase control of the outgoing beam after the parallel beam incident on the meta-surface. By the single-layer dielectric nanostructure array, so called Huygens surface, the abnormal transmission without reflection and low loss meta-atoms are realized. Five different beam deflectors were design by these meta-atoms. The different performance of five beam deflectors were discussed, and the effect of wavelength for different beam deflector was investigated next. The highest efficiency of beam deflector is around 85%. The largest deflection angle is 13.248˚ for one polymer grating. These silicon-based beam deflection meta-surfaces may be applied as blazed grating in the monochromator r, precision measurement, and laser shaping.