Chemical Nature of Electrode and the Switching Response of RF-Sputtered NbO<sub>x</sub> Films

oleh: Jamal Aziz, Honggyun Kim, Shania Rehman, Muhammad Farooq Khan, Deok-kee Kim

Format: Article
Diterbitkan: MDPI AG 2020-10-01

Deskripsi

In this study, the dominant role of the top electrode is presented for Nb<sub>2</sub>O<sub>5</sub>-based devices to demonstrate either the resistive switching or threshold characteristics. These Nb<sub>2</sub>O<sub>5</sub>-based devices may exhibit different characteristics depending on the selection of electrode. The use of the inert electrode (Au) initiates resistive switching characteristics in the Au/Nb<sub>2</sub>O<sub>5</sub>/Pt device. Alternatively, threshold characteristics are induced by using reactive electrodes (W and Nb). The X-ray photoelectron spectroscopy analysis confirms the presence of oxide layers of WO<sub>y</sub> and NbO<sub>x</sub> at interfaces for W and Nb as top electrodes. However, no interface layer between the top electrode and active layer is detected in X-ray photoelectron spectroscopy for Au as the top electrode. Moreover, the dominant phase is Nb<sub>2</sub>O<sub>5</sub> for Au and NbO<sub>2</sub> for W and Nb. The threshold characteristics are attributed to the reduction of Nb<sub>2</sub>O<sub>5</sub> phase to NbO<sub>2</sub> due to the interfacial oxide layer formation between the reactive top electrode and Nb<sub>2</sub>O<sub>5</sub>. Additionally, reliability tests for both resistive switching and threshold characteristics are also performed to confirm switching stabilities.