Research Status and Prospect of Nb - Containing Nitride Hard Film

oleh: SU Fubin, ZHANG Jun, WANG Xiaoyang, QIAN Chunhui, CHEN Lei

Format: Article
Diterbitkan: Editorial Department of Materials Protection 2022-09-01

Deskripsi

The preparation technology and microstructure properties like crystal structure, hardness, adhesion and wear resistance of the existing TiNbN hard films were analyzed and overviewed in this paper. Besides, the mechanical properties such as hardness, wear resistance and thermal shock resistance of TiAlNbN hard films were summarized. Finally, the development of TiAlNbN hard film was prospected.