Ultrafast 3D nanofabrication via digital holography

oleh: Wenqi Ouyang, Xiayi Xu, Wanping Lu, Ni Zhao, Fei Han, Shih-Chi Chen

Format: Article
Diterbitkan: Nature Portfolio 2023-03-01

Deskripsi

The application of two-photon lithography has been limited by the low writing speed. The authors reported a multi-focus improved lithography platform that employs up to 2000 laser foci to perform parallel fabrication with 90 nm resolution via optimised polymerisation and single-pulse printing strategy.