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Ultrafast 3D nanofabrication via digital holography
oleh: Wenqi Ouyang, Xiayi Xu, Wanping Lu, Ni Zhao, Fei Han, Shih-Chi Chen
Format: | Article |
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Diterbitkan: | Nature Portfolio 2023-03-01 |
Deskripsi
The application of two-photon lithography has been limited by the low writing speed. The authors reported a multi-focus improved lithography platform that employs up to 2000 laser foci to perform parallel fabrication with 90 nm resolution via optimised polymerisation and single-pulse printing strategy.