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Squared PMUT with Enhanced Pressure Sensitivities
oleh: Eyglis Ledesma, Iván Zamora, Francesc Torres, Arantxa Uranga, Vassil Tzanov, Nuria Barniol, Eloi Marigó, Mohan Soundara-Pandian
| Format: | Article |
|---|---|
| Diterbitkan: | MDPI AG 2018-11-01 |
Deskripsi
This study presents a squared AlN piezoelectric micromachined ultrasonic transducer (PMUT). Using this PMUT greater level of output pressure and higher reception sensitivity has been achieved, compared with the state-of-the-art. Another outstanding characteristic for this PMUT is that it can be monolithically integrated on CMOS substrate, being remarkably advantageous in relation to the bonding method implemented until now.