Squared PMUT with Enhanced Pressure Sensitivities

oleh: Eyglis Ledesma, Iván Zamora, Francesc Torres, Arantxa Uranga, Vassil Tzanov, Nuria Barniol, Eloi Marigó, Mohan Soundara-Pandian

Format: Article
Diterbitkan: MDPI AG 2018-11-01

Deskripsi

This study presents a squared AlN piezoelectric micromachined ultrasonic transducer (PMUT). Using this PMUT greater level of output pressure and higher reception sensitivity has been achieved, compared with the state-of-the-art. Another outstanding characteristic for this PMUT is that it can be monolithically integrated on CMOS substrate, being remarkably advantageous in relation to the bonding method implemented until now.