Technology Computer Aided Design Study of GaN MISFET With Double P-Buried Layers

oleh: Ying Wang, Meng-tian Bao, Fei Cao, Jian-xiang Tang, Xin Luo

Format: Article
Diterbitkan: IEEE 2019-01-01

Deskripsi

In this paper, a performance-improved AlGaN-/GaN-Based metal-insulator-semiconductor field effect transistor (MISFET) with double P-buried layers MISFET (DP-MISFET) is proposed. The proposed structure is simulated, and its characteristics are analyzed by the Sentaurus TCAD tool; the results show that with a gate-drain spacing of 6 &#x03BC;m, the optimized DP-MISFET can achieve high Baliga's figure of merit of 3.23 GW &#x00B7; cm<sup>-2</sup> due to the modulation of the electric field distribution. Compared with the conventional MISFET (C-MISFET) with the breakdown voltage (BV) of 503.9 V and specific on-resistance (R<sub>on,sp</sub>) of 0.63 m&#x03A9; &#x00B7; cm<sup>2</sup>, the proposed structure can achieve a better trade-off between the breakdown voltage and specific on-resistance achieving R<sub>on,sp</sub> and BV of 0.63 m&#x03A9; &#x00B7; cm<sup>2</sup> and 1427 V, respectively.