Heterogeneous Integration of Metal Oxides—Towards a CMOS Based Multi Gas Sensor Device
oleh: Anton Köck, Marco Deluca, Florentyna Sosada-Ludwikowska, Günther Maier, Robert Wimmer Teubenbacher, Martin Sagmeister, Karl Rohracher, Ewald Wachmann, Jan Steffen Niehaus, Sören Becker, Öznur Tokmak, Hendrik Schlicke, Alexander Blümel, Karl Popovic, Martin Tscherner
| Format: | Article |
|---|---|
| Diterbitkan: | MDPI AG 2019-06-01 |
Deskripsi
A worldwide unique CMOS based chemical sensor device comprising an array of 8 microhotplates (µhps) for a total of 16 chemical sensors has been fabricated (Figure 1). [...]