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High Sensitivity Low-Temperature Hydrogen Sensors Based on SnO<sub>2</sub>/κ(ε)-Ga<sub>2</sub>O<sub>3</sub>:Sn Heterostructure
oleh: Aleksei Almaev, Nikita Yakovlev, Viktor Kopyev, Vladimir Nikolaev, Pavel Butenko, Jinxiang Deng, Aleksei Pechnikov, Petr Korusenko, Aleksandra Koroleva, Evgeniy Zhizhin
Format: | Article |
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Diterbitkan: | MDPI AG 2023-06-01 |
Deskripsi
The structural and gas-sensitive properties of <i>n</i>-<i>N</i> SnO<sub>2</sub>/κ(ε)-Ga<sub>2</sub>O<sub>3</sub>:Sn heterostructures were investigated in detail for the first time. The κ(ε)-Ga<sub>2</sub>O<sub>3</sub>:Sn and SnO<sub>2</sub> films were grown by the halide vapor phase epitaxy and the high-frequency magnetron sputtering, respectively. The gas sensor response and speed of operation of the structures under H<sub>2</sub> exposure exceeded the corresponding values of single κ(ε)-Ga<sub>2</sub>O<sub>3</sub>:Sn and SnO<sub>2</sub> films within the temperature range of 25–175 °C. Meanwhile, the investigated heterostructures demonstrated a low response to CO, NH<sub>3</sub>, and CH<sub>4</sub> gases and a high response to NO<sub>2</sub>, even at low concentrations of 100 ppm. The current responses of the SnO<sub>2</sub>/κ(ε)-Ga<sub>2</sub>O<sub>3</sub>:Sn structure to 10<sup>4</sup> ppm of H<sub>2</sub> and 100 ppm of NO<sub>2</sub> were 30–47 arb. un. and 3.7 arb. un., correspondingly, at a temperature of 125 °C. The increase in the sensitivity of heterostructures at low temperatures is explained by a rise of the electron concentration and a change of a microrelief of the SnO<sub>2</sub> film surface when depositing on κ(ε)-Ga<sub>2</sub>O<sub>3</sub>:Sn. The SnO<sub>2</sub>/κ(ε)-Ga<sub>2</sub>O<sub>3</sub>:Sn heterostructures, having high gas sensitivity over a wide operating temperature range, can find application in various fields.