Shape Transformation Photolithography: Self-Assembled Arrays of Suspended MEMS Structures from Patterned Polymer Membranes
oleh: Andriy Sherehiy, Jeremy M. Rathfon, Hiroya Abe, Sri Sukanta Chowdhury, Robert W. Cohn
| Format: | Article |
|---|---|
| Diterbitkan: | American Chemical Society 2018-12-01 |
Deskripsi
No description available for this item.