Tuning the Electrical Parameters of p-NiO<sub>x</sub>-Based Thin Film Transistors (TFTs) by Pulsed Laser Irradiation

oleh: Poreddy Manojreddy, Srikanth Itapu, Jammalamadaka Krishna Ravali, Selvendran Sakkarai

Format: Article
Diterbitkan: MDPI AG 2021-06-01

Deskripsi

We utilized laser irradiation as a potential technique in tuning the electrical performance of NiO<sub>x</sub>/SiO<sub>2</sub> thin film transistors (TFTs). By optimizing the laser fluence and the number of laser pulses, the TFT performance was evaluated in terms of mobility, threshold voltage, on/off current ratio and subthreshold swing, all of which were derived from the transfer and output characteristics. The 500 laser pulses-irradiated NiO<sub>x</sub>/SiO<sub>2</sub> TFT exhibited an enhanced mobility of 3 cm<sup>2</sup>/V-s from a value of 1.25 cm<sup>2</sup>/V-s for as-deposited NiO<sub>x</sub>/SiO<sub>2</sub> TFT, subthreshold swing of 0.65 V/decade, on/off current ratio of 6.5 × 10<sup>4</sup> and threshold voltage of −12.2 V. The concentration of defect gap states as a result of light absorption processes explains the enhanced performance of laser-irradiated NiO<sub>x</sub>. Additionally, laser irradiation results in complex thermal and photo thermal changes, thus resulting in an enhanced electrical performance of the p-type NiO<sub>x</sub>/SiO<sub>2</sub> TFT structure.