A Rotary-Linear Ultrasonic Motor Using MnO<sub>2</sub>-Doped (Ba<sub>0.97</sub>Ca<sub>0.03</sub>)(Ti<sub>0.96</sub>Sn<sub>0.005</sub>Hf<sub>0.035</sub>)O<sub>3</sub> Lead-Free Piezoelectric Ceramics with Improved Curie Temperature and Temperature Stability

oleh: Cheng-Che Tsai, Sheng-Yuan Chu, Wei-Hsiang Chao, Cheng-Shong Hong

Format: Article
Diterbitkan: MDPI AG 2022-08-01

Deskripsi

In this work, a cylindrical lead-free rotary-linear ultrasonic motor was attached to piezoelectric plates of MnO<sub>2</sub>-doped (Ba<sub>0.97</sub>Ca<sub>0.03</sub>)(Ti<sub>0.96</sub>Sn<sub>0.005</sub>Hf<sub>0.035</sub>)O<sub>3</sub> ceramics using the first bending vibration to pull a thread output shaft of the interior of a stator. The effect of the proposed ceramics’ d<sub>33</sub> and Q<sub>m</sub> values are the key factors for ultrasonic motors. Therefore, MnO<sub>2</sub>-doped (Ba<sub>0.97</sub>Ca<sub>0.03</sub>)(Ti<sub>0.96</sub>Sn<sub>0.005</sub>Hf<sub>0.035</sub>)O<sub>3</sub> lead-free piezoelectric ceramics with high values of d<sub>33</sub> = 230 pC/N, Q<sub>m</sub> = 340.8 and a good temperature stability of their dielectric and piezoelectric properties are suitable for application to linear piezoelectric motors. The structure of the linear piezoelectric motor was simulated and fabricated by Finite Element Analysis. The characteristics of linear piezoelectric motors were also studied. The output characteristics of the lead-free piezoelectric motor were a left-pull velocity = 3.21 mm/s, a right-pull velocity = 3.39 mm/s, an up-pull velocity = 2.56 mm/s and a force >2 N at 39.09 kHz for an input voltage of approximately 200 V<sub>p-p</sub> (peak to peak). These results are comparable to those for a lead-based piezoelectric motor that uses PZT-4 ceramics. The proposed lead-free piezoelectric motors were successfully fabricated and used to pull a 0.5 mL commercial insulin syringe.