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By using state-of-the-art characterisation techniques including atom probe tomography and atomic resolved elemental mapping, we successfully probed the site occupation evolution associated with composition change in γ′, during 1100°C creep of a fourth generation Ru-bearing Ni-based superalloy. It is quantified that, W and Ru maintain unchanged site preference after creep rupture, while interestingly, the rest elements especially Co, Ta and Re show a weakened preference at both α- and β-sites in the γ′ lattice. This indicates the overall reduced γ′ ordering degree and thus the possible decrease in planar fault energies, which further facilitates dislocation shearing in γ′.