Miniaturized Thermal Acoustic Gas Sensor Based on a CMOS Microhotplate and MEMS Microphone
oleh: Richard Hopper, Daniel Popa, Vasileios Tsoutsouras, Florin Udrea, Phillip Stanley-Marbell
| Format: | Article |
|---|---|
| Diterbitkan: | MDPI AG 2020-12-01 |
Deskripsi
In this work, we present a novel thermal acoustic gas sensor, fabricated using a CMOS microhotplate and MEMS microphone. The sensing mechanism is based on the detection of changes in the thermal acoustic conversion efficiency which is dependent on the physical properties of the gas. The gas sensor has all the benefits of CMOS technology, including low cost and miniaturization. Here, we demonstrate its application for CO<sub>2</sub> gas detection.