Magnetostrictive Performance of Electrodeposited Tb<sub>x</sub>Dy<sub>(1−x)</sub>Fe<sub>y</sub> Thin Film with Microcantilever Structures
oleh: Hang Shim, Kei Sakamoto, Naoki Inomata, Masaya Toda, Nguyen Van Toan, Takahito Ono
| Format: | Article |
|---|---|
| Diterbitkan: | MDPI AG 2020-05-01 |
Deskripsi
The microfabrication with a magnetostrictive Tb<sub>x</sub>Dy<sub>(1−x)</sub>Fe<sub>y</sub> thin film for magnetic microactuators is developed, and the magnetic and magnetostrictive actuation performances of the deposited thin film are evaluated. The magnetostrictive thin film of Tb<sub>x</sub>Dy<sub>(1−x)</sub>Fe<sub>y</sub> is deposited on a metal seed layer by electrodeposition using a potentiostat in an aqueous solution. Bi-material cantilever structures with the Tb<sub>0.36</sub>Dy<sub>0.64</sub>Fe<sub>1.9</sub> thin-film are fabricated using microfabrication, and the magnetic actuation performances are evaluated under the application of a magnetic field. The actuators show large magnetostriction coefficients of approximately 1250 ppm at a magnetic field of 11000 Oe.