Atomic Nature of the Growth Mechanism of Atomic Layer Deposited High‑κ Y2O3 on GaAs(001)‑4 × 6 Based on in Situ Synchrotron Radiation Photoelectron Spectroscopy
oleh: Chiu-Ping Cheng, Wan-Sin Chen, Yi-Ting Cheng, Hsien-Wen Wan, Cheng-Yeh Yang, Tun-Wen Pi, Jueinai Kwo, Minghwei Hong
| Format: | Article |
|---|---|
| Diterbitkan: | American Chemical Society 2018-02-01 |
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