XRD study on the effect of the deposition condition on pulsed laser deposition of ZnO films

oleh: Man Bao, Xi Hong, Chen Chuan, Liu Mei, Wei Jing

Format: Article
Diterbitkan: De Gruyter 2008-09-01

Deskripsi

Subjek

81.05.-t; 68.55.jk; 42.70.-a; pld; zno films; deposition temperature; laser energy; anneal; lens position