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Abstract We perform an analysis of the one- and two-loop massive quark form factor in QED in a region expansion, up to next-to-leading power in the quark mass. This yields an extensive set of regional integrals, categorized into three topologies, against which factorization theorems at next-to-leading power could be tested. Our analysis reveals a number of subtle aspects involving rapidity regulators, as well as additional regions that manifest themselves only beyond one loop, at the level of single diagrams, but which cancel in the form factor.