Fabrication of arbitrary three-dimensional suspended hollow microstructures in transparent fused silica glass
oleh: Frederik Kotz, Patrick Risch, Karl Arnold, Semih Sevim, Josep PuigmartÃ-Luis, Alexander Quick, Michael Thiel, Andrei Hrynevich, Paul D. Dalton, Dorothea Helmer, Bastian E. Rapp
| Format: | Article |
|---|---|
| Diterbitkan: | Nature Portfolio 2019-03-01 |
Deskripsi
Fused silica glass has excellent optical properties, chemical and thermal stability and hardness, but its microstructuring for miniaturized applications has proven difficult. Here the authors demonstrate obtainment of precise arbitrary three dimensional hollow microstructures in fused silica glass by sacrificial template replication.