Boundary-directed epitaxy of block copolymers
oleh: Robert M. Jacobberger, Vikram Thapar, Guang-Peng Wu, Tzu-Hsuan Chang, Vivek Saraswat, Austin J. Way, Katherine R. Jinkins, Zhenqiang Ma, Paul F. Nealey, Su-Mi Hur, Shisheng Xiong, Michael S. Arnold
| Format: | Article |
|---|---|
| Diterbitkan: | Nature Portfolio 2020-08-01 |
Deskripsi
Directing the position, orientation, and long-range lateral order of block copolymer domains to produce technologically-useful, sublithographic patterns is a challenge. Here, the authors present a promising approach to overcome the challenge by directing assembly using spatial boundaries between planar, low-resolution regions on a surface with different composition.