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Sterilization of packages prior to product filling is a key step in aseptic filling machines. Chemical sterilization is one of the main conventional techniques in many packaging industries. To monitor the effect of sterilization on test microorganisms (Bacillus atrophaeus spores), an impedimetric sensor approach was developed based on a planar interdigitated electrode (IDE) design. In this work, sensor measurements were conducted to prove sensor functionality at different hydrogen peroxide concentrations.