Structural Controlling of Highly-Oriented Polycrystal 3C-SiC Bulks via Halide CVD

oleh: Zhiying Hu, Dingheng Zheng, Rong Tu, Meijun Yang, Qizhong Li, Mingxu Han, Song Zhang, Lianmeng Zhang, Takashi Goto

Format: Article
Diterbitkan: MDPI AG 2019-01-01

Deskripsi

Highly-oriented polycrystal 3C-SiC bulks were ultra-fast fabricated via halide chemical vapor deposition (CVD) using tetrachlorosilane (SiCl<sub>4</sub>) and methane (CH<sub>4</sub>) as precursors. The effects of deposition temperature (<i>T</i><sub>dep</sub>) and total pressure (<i>P</i><sub>tot</sub>) on the orientation and surficial morphology were investigated. The results showed that the growth orientation of 3C-SiC columnar grains was strongly influenced by <i>T</i><sub>dep</sub>. With increasing <i>T</i><sub>dep</sub>, the columnar grains transformed from &lt;111&gt;- to &lt;110&gt;-oriented. The arrangement of &lt;111&gt;-oriented columnar grains was controlled by <i>P</i><sub>tot</sub>. Lotus-, turtle-, thorn-, and strawberry-like surface morphologies were naturally contributed by different arrangements of &lt;111&gt;-oriented grains, and the deposition mechanism was discussed. The wetting behaviors of CVD-SiC samples by molten aluminum were also examined at 1173 K in a high vacuum atmosphere.