Find in Library

On-chip optical gas sensors, which use resonant shifts of cavities to detect molecular concentrations, have the advantages of high sensitivity, real-time detection, and compact footprint. However, such sensors are usually limited by a serious cross-sensitivity issue induced by environmental temperature variations. To overcome this limitation, we study a dual-mode graphene-on-microring resonator to accurately measure gas concentrations without suffering from temperature variations. To be specific, the influences of gas-induced graphene’s optical conductivity changes and environmental temperature variations on effective refractive indices of TE₀ and TE₁ modes in the resonator can be decoupled based on the modal linear independent responses. With this method, we designed a nitrogen dioxide sensor with a sensitivity of 0.02 nm/ppm and a limit of detection of 0.5 ppm. Our study paves the way for developing on-chip optical gas sensors with excellent sensitivity and temperature stability.