Dynamic modulation of modal coupling in microelectromechanical gyroscopic ring resonators
oleh: Xin Zhou, Chun Zhao, Dingbang Xiao, Jiangkun Sun, Guillermo Sobreviela, Dustin D. Gerrard, Yunhan Chen, Ian Flader, Thomas W. Kenny, Xuezhong Wu, Ashwin A. Seshia
| Format: | Article |
|---|---|
| Diterbitkan: | Nature Portfolio 2019-10-01 |
Deskripsi
Micro- and nanomechanical resonators play a crucial role in sensing applications. Here, the authors demonstrate electrically tunable modal coupling in capacitive microelectromechanical gyroscopic ring resonators that allows for improving the performance micro/nano-sensors relying on precise control of the degree of modal coupling.