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Fabrication of Black Silicon With Thermostable Infrared Absorption by Femtosecond Laser
oleh: Chun-Hao Li, Ji-Hong Zhao, Xin-Yue Yu, Qi-Dai Chen, Jing Feng, Hong-Bo Sun
Format: | Article |
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Diterbitkan: | IEEE 2016-01-01 |
Deskripsi
Annealing-insensitive black silicon with high absorption below the silicon bandgap has been achieved by femtosecond laser direct writing. Spike microstructures with sizes ranging from 4 to 25 μm are formed on the surface layer of silicon substrate, and a large amount of phosphorous impurities (10<sup>21</sup> cm<sup>-3</sup>) is doped during the resolidification process. The infrared absorption of phosphorus-doped black silicon decreases slightly with both the annealing temperature and duration. Excitingly, the largest decrease is less than 10% at 2 μm (annealing 240 min at 873K). This thermostable infrared absorption is related to free carrier absorption. After laser irradiation, the phosphorus-doped layer maintains a relatively high crystallinity that can be improved further during thermal annealing. The density of the electrically activated impurities is approximately 10<sup>19</sup> cm<sup>-3</sup>.