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Radio frequency (RF) magnetron sputtering allows the fabrication of TiO₂ films with high purity, reliable control of film thickness, and uniform morphology. In the present study, the change in surface roughness upon heating two different thicknesses of RF sputter-deposited TiO₂ films was investigated. As a measure of the process of the change in surface morphology, chemically -synthesised phosphine-protected Au₉ clusters covered by a photodeposited CrO_x layer were used as a probe. Subsequent to the deposition of the Au₉ clusters and the CrO_x layer, samples were heated to 200 ℃ to remove the triphenylphosphine ligands from the Au₉ cluster. After heating, the thick TiO₂ film was found to be mobile, in contrast to the thin TiO₂ film. The influence of the mobility of the TiO₂ films on the Au₉ clusters was investigated with X-ray photoelectron spectroscopy. It was found that the high mobility of the thick TiO₂ film after heating leads to a significant agglomeration of the Au₉ clusters, even when protected by the CrO_x layer. The thin TiO₂ film has a much lower mobility when being heated, resulting in only minor agglomeration of the Au₉ clusters covered with the CrO_x layer.