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Laser micro bending process of Ti6Al4V square bar are carried out using a 3D thermo-mechanical finite element analytical model (FEM). The transient temperature fields, displacement fields, stress fields and strain fields are obtained and analyzed. The results show that the bending angel during laser micro bending process is in good agreement with experimental measurements. The effects of process parameters on temperature and deformation are also investigated here. During the bending process the temperature increases with the increase of the laser power and the irradiation time. Radiation of the laser beam yields to a rapid temperature increase at the irradiated surface, which leads to the high temperature gradients between the irradiated surface and the unirradiated surface, which suggest that the mechanism of laser micro bending is the temperature gradient mechanism. The z displacement of forward direction and reverse direction increase when the laser power and irradiation time increase. Laser micro bending process can obtain the larger bending angles reverse to laser beam using higher laser power and shorter irradiation time.