TSSOI as an efficient tool for diagnostics of SOI technology in Institute of Electron Technology
oleh: Mateusz Barańsk, Maria Sapor, Halina Niemiec, Jacek Marczewski, Krzysztof Kucharski, Wojciech Kucewicz, Andrzej Kociubiński, Bohdan Jaroszewicz, Mirosław Grodner, Krzysztof Domański, Daniel Tomaszewski
| Format: | Article |
|---|---|
| Diterbitkan: | National Institute of Telecommunications 2005-03-01 |
Deskripsi
This paper reports a test structure for characterization of a new technology combining a standard CMOS process with pixel detector manufacturing technique. These processes are combined on a single thick-film SOI wafer. Preliminary results of the measurements performed on both MOS SOI transistors and dedicated SOI test structures are described in detail.