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Grating couplers integrated on Mach-Zehnder interferometric biosensors operating in the visible range
oleh: Daphne Duval, Johann Osmond, Stefania Dante, Carlos Dominguez, Laura M. Lechuga
| Format: | Article |
|---|---|
| Diterbitkan: | IEEE 2013-01-01 |
Deskripsi
We present the design, fabrication, and characterization of submicronic grating couplers integrated on Si<sub>3</sub>N<sub>4</sub> rib waveguide Mach-Zehnder interferometers (MZIs) for biosensing applications working in the visible spectral range for both TE and TM polarizations. Depending on the waveguide structure, a maximum of 11.5% of coupling efficiency has been experimentally obtained at 658 nm, while a limit of detection of 1.6 × 10<sup>-7</sup> in refractive index unit is achieved for the biosensor. These results represent an important milestone toward the achievement of a truly portable and multiplexed point-of-care platform using the integrated MZI sensor.