Nanofabrication for all-soft and high-density electronic devices based on liquid metal

oleh: Min-gu Kim, Devin K. Brown, Oliver Brand

Format: Article
Diterbitkan: Nature Portfolio 2020-02-01

Deskripsi

Though all-soft electronic devices with liquid metals are attractive due to the material’s compatibility with patterning methods, obtaining sub-micron patterns remains a challenge. Here, the authors report a hybrid lithography process to realize all-soft submicron-scale devices based on EGaIn.