Realising high aspect ratio 10 nm feature size in laser materials processing in air at 800 nm wavelength in the far-field by creating a high purity longitudinal light field at focus
oleh: Zhaoqing Li, Olivier Allegre, Lin Li
| Format: | Article |
|---|---|
| Diterbitkan: | Nature Publishing Group 2022-12-01 |
Deskripsi
Holes of 10–30 nm in diameter are produced on sapphire with a depth to width aspect ratio of over 16 and a zero taper with a single pulse longitudinal field.