Reaching silicon-based NEMS performances with 3D printed nanomechanical resonators
oleh: Stefano Stassi, Ido Cooperstein, Mauro Tortello, Candido Fabrizio Pirri, Shlomo Magdassi, Carlo Ricciardi
| Format: | Article |
|---|---|
| Diterbitkan: | Nature Portfolio 2021-10-01 |
Deskripsi
NEMS devices, nano-electro-mechanical systems, by virtue of their minute size, offer ultra-high sensitivity, though at the expense of manufacturing complexity. Here, Stassi et al succeed in manufacturing high quality factor NEMS devices using high resolution 3D printing.