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Abstract In this paper, a special ultrasonic microforming method, Micro Ultrasonic thin Sheetmetal Forming using molten plastic as a flexible punch (short as Micro-USF), was used to conduct micro-punching experiments on stainless steel sheet with thickness of 10 μm and 20 μm. The influence of ultrasonic vibration on forming force and forming quality were investigated. The experimental results showed that the forming force required for punching thin sheet metal decreased gradually as the ultrasonic time or ultrasonic power increased. By applying the ultrasonic vibration effect, the forming force could be decreased dramatically and the maximum value of forming force drop could reach 86%. Moreover, with the application of ultrasonic vibration, the size accuracy and shape accuracy of micro-holes could be increased by 36.92% and 22.65%, but the cross-section quality of micro-holes were not significantly improved.