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A Review on the Pathways of the Improved Structural Characteristics and Photocatalytic Performance of Titanium Dioxide (TiO<sub>2</sub>) Thin Films Fabricated by the Magnetron-Sputtering Technique
oleh: Yu-Hsiang Wang, Kazi Hasibur Rahman, Chih-Chao Wu, Kuan-Chung Chen
Format: | Article |
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Diterbitkan: | MDPI AG 2020-05-01 |
Deskripsi
Titanium dioxide (TiO<sub>2</sub>) thin films are used for a broad range of applications such as wastewater treatment, photocatalytic degradation activity, water splitting, antibacterial and also in biomedical applications. There is a wide range of synthesis techniques for the deposition of TiO<sub>2</sub> thin films, such as chemical vapor deposition (CVD) and physical vapor deposition (PVD), both of which are well known deposition methods. Layer by layer deposition with good homogeneity, even thickness and good adhesive nature is possible by using the PVD technique, with the products being used for photocatalytic applications. This review studies the effects of magnetron sputtering conditions on TiO<sub>2</sub> films. This innovative technique can enhance the photocatalytic activity by increasing the thickness of the film higher than any other methods. The main purpose of this article is to review the effects of DC and RF magnetron sputtering conditions on the preparation of TiO<sub>2</sub> thin films for photocatalysis. The characteristics of TiO<sub>2</sub> films (i.e., structure, composition, and crystallinity) are affected significantly by the substrate type, the sputtering power, the distance between substrate and target, working pressure, argon/oxygen ratio, deposition time, substrate temperature, dopant types, and finally the annealing treatment. The photocatalytic activity and optical properties, including the degree of crystallinity, band gap (<i>E<sub>g</sub></i>), refractive index (<i>n</i>), transmittance (<i>T</i>), and extinction coefficient (<i>k</i>), of TiO<sub>2</sub> films are dependent on the above- mentioned film characteristics. Optimal TiO<sub>2</sub> films should have a small particle size, a strong degree of crystallinity, a low band gap, a low contact angle, a high refractive index, transmittance, and extinction coefficient. Finally, metallic and nonmetallic dopants can be added to enhance the photocatalytic activity of TiO<sub>2</sub> films by narrowing the band gap.