Author Correction: Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry

oleh: Ufuk Kilic, Alyssa Mock, Derek Sekora, Simeon Gilbert, Shah Valloppilly, Giselle Melendez, Natale Ianno, Marjorie Langell, Eva Schubert, Mathias Schubert

Format: Article
Diterbitkan: Nature Portfolio 2021-03-01

Deskripsi

An amendment to this paper has been published and can be accessed via a link at the top of the paper.