Direct Ink Writing of SiCN/RuO<sub>2</sub>/TiB<sub>2</sub> Composite Ceramic Ink for High-Temperature Thin-Film Sensors

oleh: Yusen Wang, Lida Xu, Xiong Zhou, Fuxin Zhao, Jun Liu, Siqi Wang, Daoheng Sun, Qinnan Chen

Format: Article
Diterbitkan: MDPI AG 2024-08-01

Deskripsi

Direct ink writing (DIW) of high-temperature thin-film sensors holds significant potential for monitoring extreme environments. However, existing high-temperature inks face a trade-off between cost and performance. This study proposes a SiCN/RuO<sub>2</sub>/TiB<sub>2</sub> composite ceramic ink. The added TiB<sub>2</sub>, after annealing in a high-temperature atmospheric environment, forms B<sub>2</sub>O<sub>3</sub> glass, which synergizes with the SiO<sub>2</sub> glass phase formed from the SiCN precursor to effectively encapsulate RuO<sub>2</sub> particles. This enhances the film’s density and adhesion to the substrate, preventing RuO<sub>2</sub> volatilization at high temperatures. Additionally, the high conductivity of TiB<sub>2</sub> improves the film’s overall conductivity. Test results indicate that the SiCN/RuO<sub>2</sub>/TiB<sub>2</sub> film exhibits high linearity from room temperature to 900 °C, high stability (resistance drift rate of 0.1%/h at 800 °C), and high conductivity (4410 S/m). As a proof of concept, temperature sensors and a heat flux sensor were successfully fabricated on a metallic hemispherical surface. Performance tests in extreme environments using high-power lasers and flame guns verified that the conformal thin-film sensor can accurately measure spherical temperature and heat flux, with a heat flux sensor response time of 53 ms. In conclusion, the SiCN/RuO<sub>2</sub>/TiB<sub>2</sub> composite ceramic ink developed in this study offers a high-performance and cost-effective solution for high-temperature conformal thin-film sensors in extreme environments.