Growth of nonpolar a-plane AlGaN epilayer on Al-composition graded-AlGaN buffer layer and characterization of its surface morphology and crystalline quality

oleh: Abbas Nasir, Bin Xu, Irshad Ali, Jehan akbar

Format: Article
Diterbitkan: IOP Publishing 2022-01-01

Deskripsi

Metal-organic chemical vapor deposition was successfully used to grow un-doped nonpolar a- plane AlGaN on an r- plane sapphire substrate. High-resolution x-ray (HR-XRD), atomic force microscopy, Polarization Indirect Microscopic Imaging, and Hall effect measurement were used to investigate the effect of the nonpolar a- plane AlGaN layer on the graded AlGaN buffer layer. The results reveal that inserting the AlGaN-graded layer improves the crystalline quality and morphology of the surface. The root means the square value was less than 1.47 nm, while the background electron concentration was $-3.9\times {10}^{17}\,{{\rm{cm}}}^{-3}.$ In addition, the HR-XRD full width at half maximum indicates improved crystalline quality.