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Abstract NLO evolution of the Jalilian-Marian-Iancu-McLerran-Weigert-Leonidov-Kovner (JIMWLK) equation with massless quarks was derived a few years ago. We make a step further to compute the evolution kernels focusing on the effects due to finite quark masses. To this goal, the light-cone wave function of a fast moving dilute hadronic projectile is computed up to O $$ \mathcal{O} $$ (g 3) in QCD coupling constant. Compared with the massless case, a new IR divergence emerges, which is eventually canceled by a mass dependent counter term. Our results extend the theoretical tools used in physics of gluon saturation and aim at improving precision in future phenomenological applications.