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    Partially Etched Piezoelectric Film Filled with SiO<sub>2</sub> Structure Applied to A1 Mode Resonators for Transverse Modes Suppression

    Partially Etched Piezoelectric Film Filled with SiO<sub>2</sub> Structure Applied to A1 Mode Resonators for Transverse Modes Suppression oleh Zhenyi Yu, Yu Guo, Sulei Fu, Baichuan Li, Peisen Liu, Shuai Zhang, Zongqin Sun

    Diterbitkan 2023-09-01
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