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    Electrical Characteristics and Reliability of Nitrogen-Stuffed Porous Low-<i>k</i> SiOCH/Mn<sub>2</sub>O<sub>3−x</sub>N/Cu Integration

    Electrical Characteristics and Reliability of Nitrogen-Stuffed Porous Low-<i>k</i> SiOCH/Mn<sub>2</sub>O<sub>3−x</sub>N/Cu Integration oleh Yi-Lung Cheng, Yu-Lu Lin, Chih-Yen Lee, Giin-Shan Chen, Jau-Shiung Fang

    Diterbitkan 2019-10-01
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