Hasil Pencarian - Yi-Pei Tsai

  • Menampilkan 1 - 4 hasil dari 4
Perbaiki Hasil
  1. 1
    Test Pattern Design for Plasma Induced Damage on Inter-Metal Dielectric in FinFET Cu BEOL Processes

    Test Pattern Design for Plasma Induced Damage on Inter-Metal Dielectric in FinFET Cu BEOL Processes oleh Chi Su, Yi-Pei Tsai, Chrong-Jung Lin, Ya-Chin King

    Diterbitkan 2020-05-01
    Dapatkan teks lengkap
    Artikel
    Simpan ke Daftar
    Disimpan di:
  2. 2
    Plasma Charging Effect on the Reliability of Copper BEOL Structures in Advanced FinFET Technologies

    Plasma Charging Effect on the Reliability of Copper BEOL Structures in Advanced FinFET Technologies oleh Yi-Pei Tsai, Peng-Chun Liou, Chrong Jung Lin, Ya-Chin King

    Diterbitkan 2018-01-01
    Dapatkan teks lengkap
    Artikel
    Simpan ke Daftar
    Disimpan di:
  3. 3
    Correction to: Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes

    Correction to: Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes oleh Yi-Pei Tsai, Ting-Huan Hsieh, Chrong Jung Lin, Ya-Chin King

    Diterbitkan 2017-11-01
    Dapatkan teks lengkap
    Artikel
    Simpan ke Daftar
    Disimpan di:
  4. 4
    Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes

    Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes oleh Yi-Pei Tsai, Ting-Huan Hsieh, Chrong Jung Lin, Ya-Chin King

    Diterbitkan 2017-09-01
    Dapatkan teks lengkap
    Artikel
    Simpan ke Daftar
    Disimpan di:

Alat Pencarian: