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    Fabrication of Nanostructures on a Large-Area Substrate with a Minimized Stitch Error Using the Step-and-Repeat Nanoimprint Process

    Fabrication of Nanostructures on a Large-Area Substrate with a Minimized Stitch Error Using the Step-and-Repeat Nanoimprint Process oleh Yeonjoo Ha, Hyungjun Lim, Hak-jong Choi, JaeJong Lee

    Diterbitkan 2022-09-01
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