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    A Highly Sensitive and High-Resolution Resonant MEMS Electrostatic Field Microsensor Based on Electrostatic Stiffness Perturbation

    A Highly Sensitive and High-Resolution Resonant MEMS Electrostatic Field Microsensor Based on Electrostatic Stiffness Perturbation oleh Xiangming Liu, Shanhong Xia, Chunrong Peng, Yahao Gao, Simin Peng, Zhouwei Zhang, Wei Zhang, Xuebin Xing, Yufei Liu

    Diterbitkan 2023-07-01
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