Hasil Pencarian - Satomitsu IMAI

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  1. 1
    Thin-Film Polyimide Membrane Actuators Fabricated by Etching a Substrate by DRIE (Bosch Process)

    Thin-Film Polyimide Membrane Actuators Fabricated by Etching a Substrate by DRIE (Bosch Process) oleh Satomitsu IMAI, Yusuke SHIMIZU, Shingo MATSUNO

    Diterbitkan 2012-03-01
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  2. 2
    Handling Characteristics of Mems-Tweezers with Contact Surface Fabricated by Deep-Rie

    Handling Characteristics of Mems-Tweezers with Contact Surface Fabricated by Deep-Rie oleh Satomitsu IMAI, Tadashi ISHIKAWA, Masakazu SATO, Hiroki SATO, Keisuke TAMURA

    Diterbitkan 2010-02-01
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